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Watlow® New STREAMLINE™ Gas Delivery Thermal System with ATS™ Technologies Reduces the Complexity Associated with Legacy Systems on a Semiconductor Tool
11/9/2021 12:00:00 AM
Advanced Technology Center
St. Louis, MO – Watlow®, an industry leader in the design and manufacture of complete thermal systems, announced the launch of its new STREAMLINE™ Heating System featuring Adaptive Thermal Systems® (ATS™) technologies. Watlow’s STREAMLINE system provides temperature uniformity, a reduced footprint, extensive diagnostics, and fast development times when compared to typical systems on a semiconductor tool.
Heating and controlling the thermal processes on the gas lines, forelines and exhaust lines are typically complex due to the number of components and maze of wiring all located within a small area. Watlow’s new system can help solve this market pain because Watlow’s ATS technologies allow the nuisance components to be removed from the heater, and those capabilities and functions are integrated into the EZ-ZONE® RMT controller offering closed loop control with integrated over-temperature safety protection for each heater with just two wires. This helps reduce installation errors and provides easier troubleshooting. The need to integrate fewer controllers makes installation quicker and easier by cutting the required heater connections by up to two-thirds. It also reduces costs and provides a more spatially-efficient system. In addition, Watlow’s heater design enables part reuse for future systems, which reduces SKUs and overall lead times.
Other benefits of the system include real-time diagnostics about every heater in the application, connection with industry standard communications protocols including EtherCAT®, Ethernet and DeviceNet™ and compliance to the required industry certifications.
“We understand the pain in the industry associated with the complexity of typical gas delivery thermal systems,” said Doug Schaefer, business segment director. “Watlow’s new STREAMLINE system enhances the gas delivery system with an aesthetically pleasing and yet powerful solution with less wires and more functionality.”For more information on Watlow’s new STREAMLINE™ system, please click here.