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Heaters Aid Semiconductor Manufacturing

Problem:

A low temperature heater is needed for vacuum vapor deposition in semiconductor manufacturing. This insures uniform and accurate vapor etching, without introducing contamination into vacuum..

Solution:

A polyimide heater, with an etched foil element, was designed with distributed wattage and internal thermocouples. Watlow bonded the heater to the customer's part with a shielded foil cover. Polyimide's low outgassing qualities keeps contamination in the vacuum chamber to a minimum.