Sensors

Temperature sensor accuracy, repeatability and stability are critical for wafer processing applications. Watlow’s advanced sensor technologies around fiber optics, thermocouples and RTDs and thermistor sensor assemblies are specially designed to ensure precise and repeatable temperature feedback in challenging environments. Watlow’s fiber optic sensor offers superior accuracy in RF plasma conditions and reduces the required footprint by integrating the signal conditioner into the temperature control module.

Contact your Watlow semiconductor representative for more information.