Temperature sensor accuracy, repeatability and stability are critical for wafer processing applications. Watlow’s advanced sensor technologies around fiber optics, thermocouples and RTDs and thermistor sensor assemblies are specially designed to ensure precise and repeatable temperature feedback in challenging environments. Watlow’s fiber optic sensor offers superior accuracy in RF plasma conditions and reduces the required footprint by integrating the signal conditioner into the temperature control module.
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Electronics and Controls
Precise thermal control can only be accomplished with temperature controllers having algorithms optimized for a specific application. Watlow's family of EZ-ZONE® controllers combine temperature (with RF immune temperature sensing), process, limit, current monitoring, alarms, data logging and more to complete the thermal loop. Our controllers not only provide precision closed loop control, but also provide a means to network the thermal aspects of the semiconductor process. Watlow temperature controllers support communications via EtherCAT®, standard bus, DeviceNet™, Ethernet/IP™, PROFIBUS, Modbus® TCP and Modbus® RTU. Watlow also provides custom control box designs delivering integrated turn-key control systems and solutions.