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Etch Solutions4-zone

With continued semiconductor scaling, etch applications require highly precise and extremely complex thermal systems. Temperature deviation has a significant impact on critical etch parameters such as CD, etch rate, etch profile and selectivity, all of which directly impact the yield quality or throughput on the tool. Watlow has innovative solutions in areas such as advanced controls, RF immunity and temperature tuneability to enhance etch tool performance.


Contact your Watlow semiconductor representative for more information.