WHITE PAPER: Examples of Equipment Refurbishment Opportunities to Control Costs in Semiconductor Fabrication
Many parts critical to front-end semiconductor fabrication (such as electrostatic chucks,wafer pedestals, ceramic heaters and implant wheels) experience wear-and- tear over time. This can cause parts to fail, and replacement can be expensive, both in terms of new parts and in terms of downtime needed to install them. Newer technologies are now available that make refurbishment existing parts a feasible and cost-effective option.
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