Watlow® New STREAMLINE™ Gas Delivery Thermal System with ATS™ Technologies Reduces the Complexity Associated with Legacy Systems on a Semiconductor Tool

11/9/2021 12:00:00 AM


Advanced Technology Center

St. Louis, MO – Watlow®, an industry leader in the design and manufacture of complete thermal systems, announced the launch of its new STREAMLINE™ Heating System featuring Adaptive Thermal Systems® (ATS™) technologies. Watlow’s STREAMLINE system provides temperature uniformity, a reduced footprint, extensive diagnostics, and fast development times when compared to typical systems on a semiconductor tool.

Heating and controlling the thermal processes on the gas lines, forelines and exhaust lines are typically complex due to the number of components and maze of wiring all located within a small area. Watlow’s new system can help solve this market pain because Watlow’s ATS technologies allow the nuisance components to be removed from the heater, and those capabilities and functions are integrated into the EZ-ZONE® RMT controller offering closed loop control with integrated over-temperature safety protection for each heater with just two wires. This helps reduce installation errors and provides easier troubleshooting. The need to integrate fewer controllers makes installation quicker and easier by cutting the required heater connections by up to two-thirds. It also reduces costs and provides a more spatially-efficient system. In addition, Watlow’s heater design enables part reuse for future systems, which reduces SKUs and overall lead times.

Other benefits of the system include real-time diagnostics about every heater in the application, connection with industry standard communications protocols including EtherCAT®, Ethernet and DeviceNet™ and compliance to the required industry certifications.

“We understand the pain in the industry associated with the complexity of typical gas delivery thermal systems,” said Doug Schaefer, business segment director. “Watlow’s new STREAMLINE system enhances the gas delivery system with an aesthetically pleasing and yet powerful solution with less wires and more functionality.”

For more information on Watlow’s new STREAMLINE™ system, please click here.


About Watlow
Watlow is a global technology and manufacturing leader that provides world class engineering expertise and innovative thermal products and systems that enable customers to thrive. Since 1922, Watlow has grown in product capability, market experience and global reach. The company holds more than 1000 patents and employs 2200 employees working in 12 manufacturing facilities and three technology centers in the United States, Mexico, Europe and Asia. Watlow also has sales offices in 50 countries around the world. The company continues to grow, while the commitment remains the same – to provide its customers with superior products and services for their individual needs.

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