POWERGLIDE®
New POWERGLIDE® Enables Superior Performance of Multiple Zone Aluminum Nitride Ceramic Pedestals
POWERGLIDE® is a unique embodiment of Watlow's Adaptive Thermal Systems (ATS™) technology and combines temperature and power control into one ATS-enabled device ideal for semiconductor processing applications.
POWERGLIDE offers several communication protocols including EtherCAT®, which is optimized for the semiconductor manufacturing industry.
Features and Benefits
Built-in automatic calibration algorithm
- Eliminates downtime associated with calibration
High TCR heater materials based temperature control
- Allows closed loop control for all zones
Incorporates ceramic control algorithms
- Maintains the limitations of the materials to protect the pedestal
- Provides programmable, state-based PID control
EtherCAT® communications protocol
- Ensures adherence to industry standard protocols