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Watlow i-Catalog

Thick Film on Quartz

Watlow's Thick Film Heaters on QuartzQuartz Heater Modules

Watlow thick film quartz heater modules are intended for use in deionized (DI) water and aggressive chemical heating applications. This product employs Watlow's patented thick film on quartz technology to significantly advance the state-of-the-art in ultra-pure process heating.

These superior thick film heaters can be applied in areas where space is at a premium or where conventional heaters cannot be used because the voltage and wattage combination precludes using other types of resistive heaters. Due to the unique nature of a thick film circuit, these heaters can be designed to vary heat output across the entire surface.

U.S. Patent # 6,037,574

Features Benefits
  • Small heater module size
  • Compared to other heating technologies, saves space in expensive tools, cleanrooms and wafer fabs
  • Elimination of the need for clean-dry-air (CDA) purge
  • Other heating systems, such as infrared, require CDA purge
  • Reduction of the possibility of quartz devitrification
  • Can occur in high temperature IR heating systems
  • Elimination of potential metal contamination
  • Can occur with Teflon® (PFA) heating systems
  • Reduction of preventative maintenance (PM)
  • Increases tool uptime

Applications
Aggressive chemicals such as:
  • Ammonium hydrochloride, NH2 (HCI)
  • Hydrochloric acid, HCI
  • Hydrobromic acid, C
  • Hydrogen peroxide, H2O2
  • Phosphoric acid, H3PO4
  • Ultra pure 18MW deionized water, H2O
  • Nitric acid, HNO3
  • TMAH (Tetra Methyl Ammonium Hydroxide) (CH3) 4NOH
  • Sulphuric acid, H2SO4
  • Piranha etch (sulphuric acid + hydrogen peroxide)
  • RCA standard clean 1 (SC1) (DI + ammonium hydroxide + hydrogen peroxide)
  • RCA standard clean 2 (SC2) (DI + hydrochloric acid + hydrogen peroxide)
Flat Quartz
For more information on Watlow's thick film heaters on flat quartz, please call 1-800-4WATLOW.


Product Information

Click on the below links for more product information. PDF documents require Adobe® Reader® version 7 or higher for viewing.

Adobe® is a registered trademark of Adobe Systems Incorporated.
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Teflon® is a registered trademark of E.I. du Pont de NeMours & Company.

 
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