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Thick Film Heaters on Ceramic Substrates

Watlow's Thick Film Heaters on CeramicAlumina

Watlow's thick film heaters on alumina provide superior thermal characteristics, small heater profile, chemical compatibility and ultra-pure materials. These heaters can be designed with multiple circuits and ramp rates up to 40°C (104°F) per second depending on the application details. Thick film on alumina is capable of high operating reliability at temperatures of 500°C (932°F).

Alumina, a widely used semiconductor material due to availability, relatively low cost and stable physical properties, is a well established material for use in demanding semiconductor applications. It is relatively easy to fabricate into a range of shapes while retaining strength at high temperatures. It is available in purity levels of 96 percent.

Features Benefits
  • Multiple circuit design capability and heater patterning
  • Optimize heater performance for a specific application and precise temperature profile
  • Multi-zone capability
  • High thermal conductivity materials
  • Rapid thermal response in applications requiring fast heat up and cool down
  • Promotes uniform surface temperature
  • Thin ceramic substrate
  • Allows heater to be designed with a lower profile
  • Reduces heater mass for faster thermal cycling
  • High dielectric material and thick film system
  • Ideal for applications requiring high isolation resistance
  • Material compatibility
  • Ideal for most ultra-pure semiconductor applications
  • Ideal for use in demanding applications
Applications
  • Wafer pre-heat bake stations
  • Photolithography track systems
  • Annealing
  • Wafer probers
  • Chip bonding
  • IC test
  • Atmospheric rapid thermal processing
Aluminum Nitride
For more information on Watlow's thick film heaters on aluminum nitride, please call the manufacturing facility at 1-800-4WATLOW.


Product Information

Click on the below links for more product information. PDF documents require Adobe® Reader® version 7 or higher for viewing.

Adobe® is a registered trademark of Adobe Systems Incorporated.
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