News
Watlow's Gas and Pump Line Heating Systems Offer Integrated Solutions for Complete System Responsibility
July 11, 2006
St. Louis - Watlow's gas and pump line heating systems that answer the thermal challenges in semiconductor plumbing systems, including poor conductivity of stainless steel, different thermal mass of plumbing components, or ambient temperature changes between the cleanroom and subfloor.
The intelligently designed systems combine thermal components that optimize chemical vapor deposition (CVD), metal etch process performance and process yields while reducing condensation, particle buildup and maintenance-related downtime.
Constructed from Watlow's heaters, sensors and controllers that meet UL®, CE, NEC and SEMI S2-93 safety requirements, the systems, when used in conjunction with Watlow's communication software, offer engineers an ideal solution for improving and monitoring overall process performance. Watlow's products are found throughout the semiconductor manufacturing process, providing customers with a single responsible supplier that understands how thermal systems fit within the whole production process.
The gas and pump line systems are ideal for such gas delivery line applications as boron tri-chloride, chorine-trifloride, dichlorsilane, tetra ethyl orthosilicate, TI nitride, tungsten and water vapor.
The systems also can be utilized in pump lines for CVD and metal etching applications involving low pressure chemical vapor deposition, plasma-enhanced chemical vapor deposition, aluminum etch, tungsten etch and copper etch.
The system features include:
- Even heating up to 200°C for uniform temperature profiles over the entire heated line;
- Precision electronic temperature controllers and software that is flexible to changing process requirements;
- Cleanroom-compatible silicone rubber construction;
- System components meet a combination of UL®, CE, NEC and SEMI S2-93 safety specifications;
- Optional 94-VO flame-retardant materials.
The gas and pump line systems eliminate cold spots that result in condensation or particle buildup in the lines, are comprised of construction materials and electrical circuitry that comply with UL®, CE and FM safety standards and are offered with fire-safe 94-HB or 94-VO material.
About Watlow
Since the company's founding in 1922, Watlow has brought its thermal expertise to numerous applications, including semiconductor, photovoltaic, analytical, medical, clinical, plastics processing, foodservice equipment, packaging, aerospace and others. Headquartered in St. Louis, Missouri, Watlow is the largest custom designer and manufacturer of industrial heaters, sensors, controllers and software with offices and manufacturing facilities around the world.
For additional information call your nearest Watlow representative:
Watlow
Phone: 1+ (800) WATLOW2, 1+ (314) 878-4600
Fax: 1+ (877) 893-1005, 1+ (314) 878-6814
Internet: www.watlow.com