Wet Process Equipment

Wet chemical solutions are the preferred method for etch and cleaning wafers in many semiconductor processes. Wet bench, CMP and hot DI water applications present challenges in an environment that has potential for wafer contamination and process variations that may cause defects and safety concerns. To meet the demands of wet process applications Watlow has developed a family of thermal components for acid, water, CO₂, air and solvent applications.

Thick film quartz heating technology, because of its fast response, cleanliness and low external temperature is the foundation of what is rapidly becoming the industry's preferred method of heating chemicals.

Watlow's UNIVERSAL SOLVENT heater provides NEMA 7 enclosures and redundant cooling systems that can be incorporated for safety. RAPID RESPONSE heat exchangers and STARFLOW air heaters are used to heat gases for cleaning and drying of wafers. These heater and control solutions can be designed and supplied as a critical subsystem for OEM applications.

Related Products

• Thick Film Quartz Heater Modules
• UNIVERSAL SOLVENT Heaters
• STARFLOW Nitrogen (N₂) Air Heaters
• RAPID RESPONSE Electric Heat Exchangers

Product Information

Click on the below links for more product information. PDF documents require Adobe^® Reader^® version 7 or higher for viewing.

Specification Sheets & Brochures Size/Pages

Cable/Coil Heaters 84K / 2   (PDF)  EHG SL10 Process Controller and Safety Limit 783K / 4   (PDF)  Rapid Response Heat Exchanger 130K / 2   (PDF)  Semiconductor Processing 1,966K / 36   (PDF)  Thick Film Quartz Heater Modules 209K / 8   (PDF)  UNIVERSAL SOLVENT Circulation Heaters 46K / 2   (PDF)  VERSALINE 500 In-Line Heaters 59K / 1   (PDF)

Related News Releases and Newsletters Date

Watlow Opens a Semiconductor Technology Design Center 07-12-07  Watlow's Updated DIN-A-MITE Power Controllers Offer Exceptional Performance ... 06-19-06  Watlow's Thick Film Heaters on Quartz are Ideal for Semiconductor Wet ... 07-13-04  New SERIES SD from Watlow Improves Temperature Control Through Advanced ... 07-14-03  Watlow's Rapid Response Heat Exchanger is Ideal for Precision Gas and ... 03-18-03

Product Technical Information Size/Pages

SERIES D8 User's Guide, Rev 2.0, May 2005 3,792K / 232  (PDF)

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