Gas Delivery and Pump Line Thermal Solutions

Controlling temperature of gases delivered to a vacuum chamber and out the pump lines is essential as the industry develops new processes in alignment with the Semiconductor Technology Roadmap. Platform based tools are designed to increase throughput, but also increase the thermal management challenges involved with providing consistent deposition and etch processes. Yields increase and preventative maintenance frequency can decrease when delivery and exhaust gases are controlled within the prescribed process parameters.

Watlow's gas and pump line heating systems were developed to provide flexibility in designing the optimum heating systems. Vacuum chamber plumbing systems can create a thermal challenge because of varying thermal mass, constricted spaces and last minute layout changes. The new STRETCH-TO-LENGTH® heating system and EHG controllers are standard solutions for hard to heat gas delivery lines. Integrated as a complete package, Watlow components reduce design time and system costs. Solutions with fast delivery for abatement applications are possible because Watlow has over one thousand standard heater configurations in our design files.

Related Products

• High Uniformity Gas Delivery Line Heaters
• STRETCH-TO-LENGTH^® Gas Delivery Line Heaters
• SERIES EHG Controllers
• Pump Line Heaters
• Temperature Control Consoles

Product Information

Click on the below links for more product information. PDF documents require Adobe^® Reader^® version 7 or higher for viewing.

Specification Sheets & Brochures Size/Pages

Cable/Coil Heaters 84K / 2   (PDF)  EHG SL10 Process Controller and Safety Limit 783K / 4   (PDF)  Engineering Solutions for Your Thermal Systems 247K / 8   (PDF)  High Uniformity Gas and Delivery Line 36K / 1   (PDF)  Pump and Gas Line Heating Systems 752K / 20   (PDF)  SERIES EHG Integrated Thermal Solution 874K / 2   (PDF)  Semiconductor Processing 1,966K / 36   (PDF)  Stretch-To-Length Heaters 100K / 2   (PDF)  Temperature Control Consoles 90K / 1   (PDF)

Related News Releases and Newsletters Date

Watlow's New EHG SL10 Integrated Controller is a Single Product that Integrates ... 07-17-07  Watlow Opens a Semiconductor Technology Design Center 07-12-07  Watlow's Gas and Pump Line Heating Systems Offer Integrated Solutions ... 07-11-06  Watlow Introduces Stretch-To-Length Gas Line Heater System 07-14-03

Product Technical Information Size/Pages

SERIES D8 User's Guide, Rev 2.0, May 2005 3,792K / 232  (PDF)

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