ATS

Watlow's adaptive thermal system (ATS) technology is a suite of capabilities that merges heater designs with control systems to deliver differentiated closed loop control and simplify system integration. From the chamber to the abatement system, incorporating ATS technologies will optimize the thermal performance of complex assemblies. We combine our innovative thermal systems, advanced modeling tools and ATS technologies to get control of the unpredictable.

ATS will:

  • Enable chamber matching/fingerprinting
  • Provide multi-zone azimuthal temperature control
  • Improve yields
  • Enhance diagnostics and FDC
  • Prevent ceramic pedestal breakage
  • Adapt to changing process conditions
  • Reduce wiring
  • Reduce footprint requirements
  • Lower total cost of ownership

Contact your Watlow semiconductor representative for more information